Epitaxial-like growth of solution-processed PbZr0.4Ti0.6O3 thin film on single-crystal Nb-doped SrTiO3 substrate
Hoang, Ha
Bui, Nguyen Quoc Trinh
Bui, Nguyen Quoc Trinh
PbZr0.4Ti0.6O3 (PZT) thin films have been conventionally fabricated on
traditional silicon substrates with a platinum bottom electrode;
however, as a consequence of unit cell mismatch, the films are difficult
to form as an epitaxial-like growth. Hence, PZT films deposited on
single-crystal niobium doped SrTiO3(111) substrates (Nb:STO) are
promising to solve this issue thanks to the similar perovskite structure
between PZT and STO. Essentially, Nb:STO material is a conductor,
playing a part in both bottom electrode and epitaxial substrate. In this
work, 200-nm-thick PZT films were successfully fabricated on Nb:STO
substrates by a solution process. One obtained that PZT(111) peak
started to appear on the Nb:STO substrate at a low annealing temperature
of 450oC. Also, scanning electron microscopy observation shows smooth
and homogeneous surface of PZT films on Nb:STO substrate with no grain
boundary, which evidences for epitaxial-like growth of PZT thin films.
Remnant polarization of 6 µC/cm2 and leakage current of 8×10-8 A were
obtained at applied voltage of 5 V.
Chi tiết xin mời tham khảo tại http://repository.vnu.edu.vn/handle/VNU_123/61025
| Title: | Epitaxial-like growth of solution-processed PbZr0.4Ti0.6O3 thin film on single-crystal Nb-doped SrTiO3 substrate |
| Authors: | Hoang, Ha Bui, Nguyen Quoc Trinh |
| Keywords: | PZT;Nb:STO;spin-coating;ferroelectric;FeRAM |
| Issue Date: | 2017 |
| Publisher: | ĐHQGHN |
| Series/Report no.: | Vol 33;No 4 |
| Description: | p. 36-44 |
| URI: | http://repository.vnu.edu.vn/handle/VNU_123/61025 |
| ISSN: | 2588-1124 |
| Appears in Collections: | Mathematics and Physics |
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